1. 研究目的与意义（文献综述包含参考文献）
Literature Review1 Background and significance of the subjectMask electrolytic processing is a highly efficient electrochemical processing technology for array structures, which has the advantages of no burr, no deformation, no loss of tools, and good surface quality. In stencil electrolysis, a stencil with a specific pattern is pressed against the surface of the workpiece by a mechanical external force, and the electrolyte flows between the stencil and the cathode at high speed to carry away the processing products and Joule heat, and the exposed workpiece is removed by electrolysis. In recent years, researchers have been conducting research to improve the quality of stencil electrolytic processing.Ultrasonic assist has been developing rapidly in recent years and has been widely used in many fields such as chemical, mechanical manufacturing, and biomedical. Ultrasonic cavitation can promote the discharge of electrolysis products and clean the electrode surface, and also make the solution do continuous movement to reduce the concentration polarization and improve the current density and current efficiency.2 Review of domestic and international literature2.1 Status of foreign developmentHarnam Singh Farwaha et al. [1] proposed combining ultrasonic-assisted magnetic grinding with electrolytic machining to increase machining and finishing efficiency in a study on mask machining. Fabrication of a hybrid machine that combines three operations into one unit. A combination of ultrasonic-assisted magnetic grinding and electrolytic machining was created and developed for the machining of the SS316L cylindrical workpiece outer channel. The machining efficiency of 316L stainless steel has risen by 82 percent. Within 15 minutes, the surface roughness was decreased from 1.872mm to 0.332mm. To create microchannel patterns on metal bipolar plates, Shuangqing Qian et al. [2] employed the through-mask electrochemical micromachining technique (TMEMM). Using serpentine flow channel processing as an example, an experimental apparatus for electrochemical processing was devised and built to analyze the effects of processing factors such as processing duration and current density on flow channel shape. The results demonstrate that the approach can efficiently treat microchannels on a metal surface and that the island-like morphology inside the channels may be erased when processing time is increased. As depicted in Fig. 1. Fig. 1 Example of a flow channel for electrolytic processing with a 20V pulse S. Mahata [3] pointed out that mask electrochemical micromachining is a feasible process to produce micrographic arrays of controlled size, position, and density by maintaining suitable surface texture. In this paper, patterned arrays in the form of micro-nests and micro-square features were achieved using suitable processing parameters and optimal electrolyte combinations as shown in Fig. 2. Fig. 2 Square micro dent created by TMEMM on a 20sm mask at 120s machining time (a) SEM micrograph (b) surface profile of the formed micro dent and (c) surface characteristics of the generated micro dent. Singh Patel D et al. [4] offer a porous and flexible electrode-based through-mask electrochemical micromachining method for textured surfaces of any curvature by adjusting the surface form. The influence of current density and topology of micro-textures was investigated using a 3-D numerical simulation of the TMECMM texturing in COMSOL. The minimal pitch of the micro-features in the mask is established using a created model to analyze the overlap of current density. A two-step laser beam machining procedure is used to create high-resolution, reusable masks with micro-feature arrays. For targeted anodic dissolution for texturing, these masks are placed between the flexible electrode and the target metal surfaces. The diameter and depth of the micro-dimples array are closely matched when the response surface approach-based experimental and simulated findings are compared. Machining various forms of texture arrays of micro-dimples, straight micro-channels, and tubulated micro-channels on flat, cylindrical, spherical, and free-form surfaces of SS304 demonstrates the possibilities of the proposed device. Jadhav DB et al. [5] had experimented with the investigation of MRR on Inconel 600 using ultrasonic-assisted pulse electrochemical machining. Experiments are carried out on the designed setup to find the best USAPECM setting for the highest MRR and minimal overcut. The effects of five factors on MRR and overcut are investigated: voltage, pulse on time, ultrasonic on time, ultrasonic off time, and vibration amplitude. The tests are carried out using the Taguchi approach and an L27 orthogonal array. The material removal rate of Inconel 600 is mostly impacted by increased amplitude, ultrasonic on time, ultrasonic off time, and voltage for the specified ranges, whereas pulse on time has little effect. The machining current in the IEG rose as the voltage increased, resulting in a rise in MRR. The greatest MRR was recorded during USA-PECM at Voltage (16V), Pulse on time (500 sec), Ultrasonic on time (2sec), Ultrasonic off time (8sec), and Amplitude (18). At Voltage (18V), Pulse on time (250sec), Ultrasonic on time (4sec), and Ultrasonic off time (9sec), Amplitude (20), the minimum overcut was found.2.2 Status of domestic development There are many studies on mask processing technology and ultrasonic-assisted mask processing in China. WANG Guoqian [6] In the aerospace sector, electrochemical machining (ECM) is a common machining process. Through-mask electrochemical machining is a type of electrolytic machining used to machine metal objects having hole arrays. The holes cut by through-mask electrochemical machining feature tapered angles due to their anisotropic nature, and decreasing these tapered angles remains a difficulty. G.Q. Wang [7] explored double-sided through-hole electrochemical processing and suggested a double-sided through-mask electrochemical technique for the fabrication of low-taper hole arrays to generate low-taper hole arrays. The reduced taper angle of the treated holes is aided by the electric field of the double-sided through-mask electrolytic process. The sidewalls of machined holes can be almost straight within a specified processing period, according to experimental data. Wang Y et al. [8] made a study on surface roughness of large size TiAl intermetallic blade in electrochemical machining. The findings of exploratory trials of DC ECM and pulse ECM at various pulse frequencies demonstrate that pulse ECM at low pulse frequency is more likely to produce blades with good surface quality. Based on low pulse frequency, a two-step variable parameter ECM technique is developed, which eradicated the "patchy" morphology and elevated flaws on the blade surface, and lowered the surface roughness from around Ra 5.5 m to about Ra 1.8 m. Based on the direction of the flow mark, a control technique for multi-channel pressure difference at the intake is presented, which successfully removed the flow mark defect on the blade surface, further decreased the surface roughness to roughly Ra 0.9 m, and produced a blade with outstanding surface quality. Li H [9] studied the Hole-Formation Process with Different Mask Diameters via Through-Mask Electrochemical Machining. The punch-hole stage and enlarge-hole stage in the hole-formation process were investigated using a finite element electric field model of through-mask electrolysis. The corrosion rate of small diameter masks is greater than that of big diameter masks early in the punch-hole stage. A small diameter mask's corrosion rate decreases quicker than a big diameter mask's as the machining depth is increased. At this point, the big diameter mask's corrosion rate may be faster than the small diameter mask. The corrosion rate of the big diameter mask is always higher than that of the small-diameter mask during the enlarge-hole stage. The manufactured holes for various mask sizes took the least machining time for the 0.2-mm Ni-based superalloy plate. With a mask diameter of 0.2 mm, the hole-formation process takes 80 seconds, 70 seconds with a mask diameter of 0.3 mm, 60 seconds with a mask diameter of 0.4 mm, and 50 seconds with mask diameters of 0.5 mm and 0.6 mm. The greater the mask diameter, within a given range, the faster the hole creation time. For a 0.2-mm Ni-based superalloy plate, the hole machining timings are specified. According to the desired hole diameters, suitable mask diameters and machining times may be set. Zhai K et al. [10] proposed the fabrication of micro pits based on megasonic assisted through-mask electrochemical micromachining. The theoretical analysis of the coupling relationship between the sound field, the gas-liquid two-phase flow field, and the electrolytic process. The findings of the theoretical study show that agitating the electrolyte with acoustic waves can speed up the electrolytic process by enhancing the conductivity of the electrolyte. Furthermore, simulation studies demonstrate that adding megasonic wave agitation to the TMEMM process can increase deep etching capabilities and machining localization. Then, at 1 MHz, a high-efficiency and integrated megasonic electrolyzer were built. Different megatons intensities were used to etch micro pits. When working with increasing megatons intensity, MA-TMEMM demonstrated good process performance. Micro pits with an average diameter of 167.77 m and a depth of 79.62 m were created when the megasonic intensity was set to 8 W/cm2. The micro pits' average depth-to-diameter ratio was 0.47, and the EF was 2.35. When compared to regular TMEMM, MA-deep TMEMM's etching capabilities rose by around 57 percent. In comparison to regular TMEMM, MA-TMEMM boosted machining localization by 50%. In the TMEMM process, megasonic wave agitation can increase deep etching capabilities and machining localization, which is compatible with simulation results. In addition, the megasonic operating mechanism in the MA-TMEMM process was investigated. It suggests that by enhancing the conductivity of the electrolyte, megasonic agitation might primarily boost the electrolytic process. In conclusion, MA-TMEMM has the potential to be a viable alternative micromachining approach in the future. Chenhao Zhao et al. [11] proposed Through-Mask Electrochemical Micromachining with Reciprocating Foamed Cathode. Micromachines. A modified foamed cathode through-mask electrochemical micromachining technique was developed in this work to create microstructure arrays with improved dimensional uniformity and surface quality without the usage of a typical pump-driven circulation system. The reusable mask is pushed by the magnetic field force in the improved process, and the sandwich-like machining assembly travels in a linear reciprocation pattern to self-circulate the electrolyte within the assembly. The TMEMM technique, which uses a modified foamed cathode, makes it easier to create substantial homogeneous micro-dimples with a good surface shape. The machined micro-depth dimples and diameter have a coefficient of variation of 5.4 percent and 1.9 percent, respectively, and the minimal surface roughness Ra is 0.210.35 m. This is mostly owing to the magnetic field force's substantially effective fastening of the through-mask on the workpiece and the increased mass transfer caused by MHD effects. Because it removes the negative wake effect and keeps the anodic dissolution process in the highly efficient mass transfer state, the modified foamed cathode TMEMM method is only effective and practicable when performed in a single-travel machining mode. The applied voltage and the machining assembly's movement speed must be properly matched for the modified foamed cathode. That is, higher applied voltages equate to faster machining assembly moving speeds, whereas lower applied voltages correspond to slower machining assembly moving speeds. Wang Y, Wang H, Zhang Y, et al. [12] proposed a micro-electrochemical milling method based on multi-edges disk tool electrode in-situ micro-WEDM for array micro-grooves manufacture. The advantages of micro-WEDM technology in the thin edge rotary structure are perfectly leveraged in this way. Disk tool electrodes can be made in a variety of thicknesses. The minimum edge width is 50 meters. The duration that the wire remains on the corner of the edge diminishes when the wire motion path is changed, and the edge profiles become more accurate as the path is improved. The original micro-WEDM machine has a micro-ECM milling module installed, allowing micro-ECM to be performed without dismantling the disc tool electrode. It eliminates re-clamping errors and improves processing precision. On micro-ECM milling, the effects of parameters and processing conditions are investigated. Appropriate parameters are chosen, and a groove with a width of 146 m and a surface roughness of Ra 0.26 m is achieved using a disc electrode with an edge width of 90 m. A micro-ECM milling module was added to the original micro-WEDM machine, allowing micro-ECM to be conducted without disassembling the disc tool electrode. Re-clamping mistakes are eliminated, and processing accuracy is improved. The impact of factors and processing conditions on micro-ECM milling are explored. A groove with a width of 146 m and a surface roughness of Ra 0.26 m is obtained utilizing a disc electrode with an edge width of 90 m and the appropriate parameters. Guochao Fan et al. [13] suggested employing a conductive masked porous cathode and jet electrolyte supply to electrochemically machine micro-grooves. The conductive mask is directly linked to the workpiece in this setup, obviating the need for an insulated mask. A porous cathode and a metallic nozzle are used to deliver a jetted electrolyte in the machining zone with improved mass transfer. The modeling and experimental findings show that, as compared to using an insulated mask, using a conductive mask reduces the electric field intensity on both sides of the machining zone, which helps to reduce overcut and improve machining localization. For this process configuration, the influence of electrolyte pressure is explored, and it has been discovered that a high electrolyte pressure increases mass transfer and machining quality. The use of a conductive mask lowered the electric field intensity on both sides of the micro-groove, achieving the goal of reducing overcut, according to the simulation findings. When comparing the results of fabricating micro-grooves with the same depth of 45 m using an insulated mask and a conductive mask, it was discovered that the etch factor increased from 0.75 (insulated mask) to 3.3 (conductive mask), indicating that the machining localization of micro-grooves was improved. A high electrolyte pressure was beneficial for electrolyte renewal and boosted mass transfer during processing in this process scheme, which improved the machining quality and dimensional uniformity of the micro-grooves. The machining localization is influenced by the pulse duty cycle. Micro-grooves with superior machining localization and surface quality might be obtained with a low pulse duty cycle of 20%. Chin-Wei Liu et al. [14] preferred a moving tool with a small size to substitute which tool size is usually the same as the working pieces. The electric field model of through-mask micro-electrochemical machining with the moving tool is created using the finite element approach in this research. This study uses a finite element technique to develop an electric field model of through-mask micro-electrochemical machining with a moving tool. The higher the applied voltage, the greater the machining depth and width, as well as the better the aspect ratio. The electric field is unevenly distributed and lateral corrosion is more severe when the mask thickness is narrow. There is an island-like phenomenon that is linked to mask masking. The relative processing time is larger when the movement speed is sluggish. The machining depth deepens as the processing time rises, and the forward corrosion rate slows. Xiangming Zhu et al. [15] proposed a new method of machining small holes called ultrasonic-assisted electrochemical drill-grinding (UAECDG). The idea of UAECDG is first investigated by looking at the UAECDG method and the electrochemical passivation behavior of materials. Second, the impact of a ball-end electrode on lowering hole taper and enhancing machining precision was investigated using a simulation of an electrochemical drill-grinding process. Following that, a series of experiments are carried out to determine the impact of electrical parameters, ultrasonic amplitude, and the degree of electrolysis and mechanical grinding matching on the machining quality of microscopic holes. Finally, UAECDG was used to produce small holes with a diameter of 1.1 0.01 mm, the surface roughness of 0.31 m, and a taper of fewer than 0.6 degrees, demonstrating that UAECDG is a potential compound machining method for fabricating small holes of high quality and efficiency.3. The ways to improve In conclusion, certain study findings have been obtained at home and abroad in regards to the theory of mask electrolytic machining, which can optimize the machining of group hole structures and array micro-groove structures while also improving machining accuracy, quality, and efficiency. Ultrasound-assisted through-mask electrochemical machining was also investigated, and it was shown that ultrasound can improve mask machining efficiency and accuracy while also reducing tool electrode loss and improving surface quality. Most through-mask electrochemical machining processing now uses a side unidirectional electrolyte supply technique, which is simple and quick to execute, but the electrolysis products are extremely easy to stick to the processing surface due to the low flow rate of the processing region. In this project, we want to create an ultrasonic-assisted through-mask electrochemical processing system that employs ultrasonic vibrations to help remove products and increase array structure formation accuracy.References1. Singh Farwaha H, Deepak D, Singh Brar G. Design and performance of ultrasonic-assisted magnetic abrasive finishing combined with the electrolytic process set up for machining and finishing of 316L stainless steel. Materials Today: Proceedings. 2020; 33:1626-1631. DOI: 10.1016/j.matpr.2020.06.1432. Qian S. Experimental Study of Metal Bipolar Plate Microchannels Fabrication Using the Through Mask Electrochemical Machining. International Journal of Electrochemical Science. Published online September 2019:9273-9282. doi:10.20964/2019.09.593. Mahata S, Kunar S, Bhattacharyya B. Fabrication of Different Micro Patterned Arrays by Through Mask Electrochemical Micromachining. Journal of The Electrochemical Society. 2019;166(8): E217-E225. DOI: 10.1149/2.0131908jes4.Singh Patel D, Agrawal V, Ramkumar J, Jain VK, Singh G. Micro-texturing on free-form surfaces using flexible-electrode through-mask electrochemical micromachining. Journal of Materials Processing Technology. 2020; 282:116644. DOI: 10.1016/j.jmatprotec.2020.1166445.Selvarajan L, Sasikumar R, Mohan DG, Naveen Kumar P, Muralidharan V. Investigations on electrochemical machining (ECM) of Al7075 material using the copper electrode for improving geometrical tolerance. Materials Today: Proceedings. 2020; 27:2708-2712. DOI: 10.1016/j.matpr.2019.12.1886. Wang G, LI H, Zhang C, Zhu D. Improvement of machining consistency during through-mask electrochemical large-area machining. Chinese Journal of Aeronautics. 2019;32(4):1051-1058. DOI: 10.1016/j.cja.2018.06.0067. Wang GQ, Li HS, Qu NS, Zhu D. Investigation of the hole-formation process during double-sided through-mask electrochemical machining. Journal of Materials Processing Technology. 2016; 234:95-101. DOI: 10.1016/j.jmatprotec.2016.01.0108.Wang Y, Xu Z, Meng D, Liu L, Fang Z. Study on surface roughness of large size TiAl intermetallic blade in electrochemical machining. Journal of Manufacturing Processes. 2022; 76:1-10. DOI: 10.1016/j.jmapro.2022.01.0359.Li H. Study of the Hole-Formation Process with Different Mask Diameters via Through-Mask Electrochemical Machining. International Journal of Electrochemical Science. Published online March 2018:3006-3022. doi:10.20964/2018.03.4610.Zhai K, Du L, Wen Y, et al. Fabrication of micro pits based on megasonic assisted through-mask electrochemical micromachining. Ultrasonics. 2020; 100:105990. DOI: 10.1016/j.ultras.2019.10599011.Zhao, Ming, Zhang, et al. Through-Mask Electrochemical Micromachining with Reciprocating Foamed Cathode. Micromachines. 2020;11(2):188. doi:10.3390/mi1102018812.Wang Y, Wang H, Zhang Y, et al. Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM. Micromachines. 2020;11(1):66. doi:10.3390/mi1101006613.Fan G, Chen X, Saxena KK, Liu J, Guo Z. Jet Electrochemical Micromachining of Micro-Grooves with Conductive-Masked Porous Cathode. Micromachines. 2020;11(6):557. doi:10.3390/mi1106055714.Liu C-W, Chen C-H, Lee S. Simulation and analysis of through-mask electrochemical machining with moving tools. Advances in Mechanical Engineering. 2021;13(4):168781402110099. doi:10.1177/1687814021100999615. Zhu X, Liu Y, Zhang J, Wang K, Kong H. Ultrasonic-assisted electrochemical drill-grinding of small holes with high-quality. Journal of Advanced Research. 2020; 23:151-161. DOI: 10.1016/j.jare.2020.02.010
2. 研究的基本内容、问题解决措施及方案
1 Content of studyDesign the distribution form of ultrasonic vibrators, analyze the ultrasonic vibrator bearing fixture; meanwhile, combine with the technical characteristic of template electrolytic processing, and complete the design of other components.2 Possible problems encounteredIt is necessary to understand the penetration of ultrasonic waves and to make the ultrasonic vibrator reasonable to maximize its efficiency. Depending on the size of the processed parts, choosing the appropriate oscillator, ultrasound too large or too small may not maximize efficiency.3 Method usedFirst, literature survey method: In the pre-preparation stage of the study, relying on the digital library and network resources, the relevant theories of ultrasonic-assisted electrolytic processing were collected and studied. By reading relevant literature and collecting relevant training theories, the preliminary ideas of investigation and research were established.Second, data collection: The ultrasonic oscillator models and parameters are collected and selected reasonably according to the requirements.Third, use CREO to draw a model drawing of the designed model.
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